A hybrid, one-dimensional model for studying electron kinetic effects and electron heating due to the rf plasma boundary sheath

Brian Heil, Julian Schulze, Thomas Mussenbrock, Ralf Peter Brinkmann, Uwe Czarnetzki

Work­shop on Ra­dio-Fre­quen­cy Di­sch­ar­ges, Du­blin, Ire­land, 11-13 June

Tags: Hybrid, one dimensional simulation, RF plasma boundary sheath