Inspection of semiconductor-based planar wave-guiding structures with a near-infrared transmissi­on digital holographic microscopy

Vira R. Besaga, Nils C. Gerhardt, Martin R. Hofmann

Proc. SPIE 11369, Fourteenth International Conference on Correlation Optics, 1136911 (February 6, 2020); doi: 10.1117/12.2553911

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