Kinetic approach to the nonlinearity of RF modulated sheath

Mohammed Shihab, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

Tags: Kinetic approach, nonlinearity of RF modulated sheath