Measurement and simulation of Ar and He metastable density profiles in radio- frequency micro-plasma jets

Benedikt Niermann, Torben Hemke, Marc Böke, Thomas Mussenbrock, Ralf Peter Brinkmann, Jörg Winter

IWM6, VI International Workshop on Microplasmas, Paris,France, 03-06 April

Tags: Ar and He metastable density, Measurement and simulation, radio- frequency micro-plasma jets