Model-based Control Concept for Capacitive Discharges

Dennis Ziegler, Jan Falkenhain, Thomas Mussenbrock, Ralf Peter Brinkmann

Eu­ropean Sum­mer School Low Tem­pe­ra­tu­re Plas­ma Phy­sics: Ba­sics and Ap­p­li­ca­ti­ons, Bad Hon­nef, Ger­ma­ny, 08-13 Oc­to­ber

Tags: Control Concept, model-based