Modeling and simulation of the plasma absorption probe

Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann, Chritsian Scharwitz, Mark Böke, Jörg Winter

Appl. Phys. Lett. 90, 121502 (2007);(3 pages)


Abstract

The plasma absorption probe (PAP) was invented as an economical and robust diagnostic device to determine the electron density distribution in technical plasmas. It consists of a small antenna enclosed by a dielectric tube which is immersed in the plasma. A network analyzer feeds a rf signal to the antenna and displays the frequency dependence of the power absorption. From the absorption spectrum the value of the electron density is calculated. The original evaluation formula was based on the dispersion relation of plasma surface waves propagating along an infinite dielectric cylinder. In this letter the authors present the analysis of a less idealized configuration. The calculated spectra are in good qualitative agreement with their experimental counterparts, but differ considerably from those predicted by the surface wave ansatz. An evaluation scheme which takes our findings into account will improve the performance of the PAP technique further.

[DOI]

Tags: Antenna, electron density distribution, frequency dependence, plasma absorption probe, power absorption spectrum