Multi frequency matching for voltage waveform tailoring

Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann, Thomas Mussenbrock

Plas­ma Sour­ces Sci­ence and Tech­no­lo­gy, Vo­lu­me 27, Num­ber 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cd

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