The Multipole Resonance Probe (MRP): A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann

Appl. Phys. Lett. 93, 051502 (2008)


Abstract

A diagnostic concept is presented which enables the simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure gas discharges. The proposed method utilizes a radio-frequency driven probe of particular spherical design which is immersed in the plasma to excite a family of spatially bounded surface resonances. An analysis of the measured absorption spectrum S(omega) of the probe provides information on the distribution of the plasma in its vicinity, from which the values of the plasma parameters can be inferred. In its simplest realization, the probe consists of two dielectrically shielded, conducting hemispheres, which are symmetrically driven by an radio-frequency source, and the excited resonances can be classified as multipole fields, which allows an analytical evaluation of the measured signal. The proposed method is robust, calibration free, economical, and can be used for ideal and reactive plasmas alike.

[DOI]

Tags: absorption spectrum, collision rate, electron temperature, excited resonance, multipole field, plasma density, reactive plasma, surface resonances