New insights into electron dynamics and electron heating in single and dual-frequency capacitively coupled radio frequency discharges

Timo Gans, D. O'Connel, Julian Schulze, Uwe Czarnetzki, Thomas Mussenbrock, Ralf Peter Brinkmann, A.R. Ellingboe, M.M. Turner

Proceedings of the International Center of Excellence Forum on Plasma Science and Technology, Potsdam, Germany, 2006

Tags: Dynamics, heating, new, single dualfrequency