Nonlinear Dynamics in Dual Frequency Capacitive Discharges

Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

35th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2008, Karls­ru­he, Ger­ma­ny,June 15-19

Tags: dual frequency, Dynamics, nonlinear