Nonlinear Dynamics of Dual Frequency Capacitivel Discharge

Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

Ruhr-Uni­ver­si­ty Re­se­arch School- Sec­tion Days 2007, Bo­chum, Ger­ma­ny, 05-07 No­vem­ber

Tags: dual frequency, Dynamics, nonlinear