Nonlinear electron resonance heating in dual frequency capacitive discharges

Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Co­lum­bus (Ohio), USA, 10-13 Oc­to­ber, oral contribution

Tags: dual frequency, nonlinear, resonance heating