Nonlinear electron resonance heating vs. the Herlofson paradox

Jens Oberrath, Martin Lapke, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber


Abstract

In the regime of low gas pressure, capacitive rf discharges exhibit resonant behavior which can have a profound impact on the energy budget. This contribution compares two scenarios of resonance-related electron heating known as, respectively, nonlinear electron resonance heating (NERH) and ''the Herlofson paradox''. NERH arises from the self-excitation of the plasma series resonance by harmonics generated via the nonlinearity of the plasma sheath. [1] The Herlofson paradox, on the other hand, is a linear phenomenon that occurs at points where the electron plasma frequency is locally equal to the rf frequency. [2,3,4] This contribution intended to point out similarities and differences of the two scenarios.

[1 ]T. Mussenbrock and R.P. Brinkmann, Appl. Phys. Lett. 88, 151503 (2006), [2] F.W. Crawford and K.J. Harker, J. Plasma Phys. 8, 261 (1972),[2] V.P.T. Ku, B.M. Annaratone, and J.E. Allen, J. Appl. Phys 84, 6536 (1998), [3] V.P.T. Ku, B.M. Annaratone, and J.E. Allen, J. Appl. Phys 84, 6546 (1998), [4] F.W. Crawford and K.J. Harker, J. Plasma Phys. 8, 261 (1972).

Tags: Herlofson paradox, nonlinear, resonance heating