Nonlinear electron resonance heating vs. the Herlofson paradox
Jens Oberrath, Martin Lapke, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann
60th Annual Gaseous Electronics Conference, Arlington (Virginia), USA, 02-05 October
In the regime of low gas pressure, capacitive rf discharges exhibit resonant behavior which can have a profound impact on the energy budget. This contribution compares two scenarios of resonance-related electron heating known as, respectively, nonlinear electron resonance heating (NERH) and ''the Herlofson paradox''. NERH arises from the self-excitation of the plasma series resonance by harmonics generated via the nonlinearity of the plasma sheath.  The Herlofson paradox, on the other hand, is a linear phenomenon that occurs at points where the electron plasma frequency is locally equal to the rf frequency. [2,3,4] This contribution intended to point out similarities and differences of the two scenarios.
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