Nonlinear lumped circuit modeling of an atmospheric pressure rf discharge

Martin Lapke, Dennis Ziegler, Thomas Mussenbrock, Timo Gans, Volker Schultz-von der Gathen

59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Columbus (Ohio), USA, 10-13 Oc­to­ber


Abstract

he subject of our modeling approach is a specifically modified version of the atmospheric pressure plasma jet (APPJ, originally proposed by Selwyn and coworkers[1]) with reduced discharge volume, the micro atmospheric pressure plasma jet (?-APPJ). The ?-APPJ is a homogeneous nonequilibrium discharge operated with Argon or Helium as the feedstock gas and a percentage volume admixture of a molecular gas (O2, H2, N2). The efficiency of the discharge is mainly due to the dissociated and activated molecules in the effluent that can be selected depending on the application. A variety of applications in surface treatment have already been demonstrated, e.g., in semiconductor technology, restoration and bio-medicine. In this contribution we present and analyze a nonlinear lumped circuit model of the ?-APPJ. We apply a two-scale formalism. The bulk is modeled by a generalized Ohm's law, whereas the sheath is described on a considerably higher level of mathematical sophistication. The main focus lies on the spectrum of the discharge current in order to support the characterization of the discharge via model-based diagnostics, i.e., the estimation of the spatially averaged electron density from the frequency of certain self-excitated collective resonance modes.

  1. Park et al., Appl. Phy. Lett. 76, 288 (2000)

tags: atmospheric pressure, nonlinear lumped circuit, rf discharge