Nonlinear resonance effects on electron heating in capacitive discharges

Thomas Mussenbrock, Dennis Ziegler, Markus Gebhardt, Ralf Peter Brinkmann, Michael A. Liebermann, Allan J. Lichtenberg, E. Kawamura

35th IEEE International Conference on Plasma Science 2008, Karlsruhe, Germany, June 15-19

Tags: dual frequency, nonlinear, resonance heating