A novel and simple method for independent control of ion energy and flux

Uwe Czarnetzki, Brian Heil, Julian Schulze, Zoltan Donko, Ralf Peter Brinkmann, Thomas Mussenbrock

9th Asia-Pacific Conference on Plasma Science and Technology (APCPST), Huangshan, China 2008

Tags: independent control, ion energy flux, novel, simple method