A numerical approach for simulations of the mode propagation in a microwave driven plasma discharge

Daniel Szeremley, Marc Zimmermanns, Ilona Rolfes, Ralf Peter Brinkmann, Thomas Mussenbrock, Denis Eremin

42nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), An­ta­lya, Tur­key, May 24-28, 2015 (oral contribution)

tags: Low Pressure Plasma, Microwave Driven, mode analyses, numerical simulation