Numerical investigation of the rf plasma boundary sheath

Brian Heil, Julian Schulze, Thomas Mussenbrock, Ralf Peter Brinkmann, Dirk Luggenhölscher, Uwe Czarnetzki

28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

Tags: Boundary Sheath, numerical investigation