Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure
Torben Hemke, Alexander Wollny, Markus Gebhardt, Ralf Peter Brinkmann, Thomas Mussenbrock
37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24
An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.