Numerical simulations of the electrode impedance e ect in capacitive radio frequency discharges

Max Engelhardt, Dennis Ziegler, Ralf Peter Brinkmann, Thomas Mussenbrock, Y.Yamazawa

37th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2010, Nor­folk, Vir­gi­nia, USA, June 20-24

Tags: capacitive radio frequency discharges, electrode impedance e ffect, Numerical simulations