Numerical study of the electron dynamics in Radio-Frequency plasmas at atmospheric pressure
Torben Hemke, Markus Gebhardt, Alexander Wollny, Ralf Peter Brinkmann, Thomas Mussenbrock
38th IEEE International Conference on Plasma Science 2011, Chicago, Illinois, USA, June 25-30
The dynamics of electrons plays an important role for the behavior of radio-frequency driven discharges, particularly at high pressures. The electron dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work we study a radio-frequency driven atmospheric pressure plasma jet which is frequently employed as an efficient plasma sources for surface modification. We concentrate on secondary electron effects and excitation mechanisms in Helium/Oxygen mixtures by means of self-consistent plasma simulations. Financial support from the German Research Foundation in the frame of the Research Group FOR 1123 Physics of Microplasmas is gratefully acknowledged.