Numerical study of the electron dynamics in Radio-Frequency plasmas at atmospheric pressure

Torben Hemke, Markus Gebhardt, Alexander Wollny, Ralf Peter Brinkmann, Thomas Mussenbrock

38th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2011, Chi­ca­go, Il­li­nois, USA, June 25-30


Abstract

The dynamics of electrons plays an important role for the behavior of radio-frequency driven discharges, particularly at high pressures. The electron dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work we study a radio-frequency driven atmospheric pressure plasma jet which is frequently employed as an efficient plasma sources for surface modification. We concentrate on secondary electron effects and excitation mechanisms in Helium/Oxygen mixtures by means of self-consistent plasma simulations. Financial support from the German Research Foundation in the frame of the Research Group FOR 1123 Physics of Microplasmas is gratefully acknowledged.

Tags: APPJ, atmospheric pressure, rf jet, secondary electrons