Parallelization Concept for Spatially Resolved In-Situ Plasma Measurements

Christian Schulz, Jan Niclas Runkel, Ilona Rolfes

IEEE International Microwave Symposium (IMS), Phoenix, USA, May 17 – 22, 2015


A novel, simple, and passive parallelization concept for the simultaneous determination of plasma density by spatially resolved plasma probes is presented in this paper. Based on the so-called Multipole Resonance Probe (MRP), a Wilkinson divider, and two coaxial cables with different length, the resulting reflection coefficients of each probe can be separated in time domain. Hence, the corresponding plasma density at different positions in a reactor can be determined without limitations. The basic concept is confirmed by simulative investigations in CST Schematic. Therefore, 3D electromagnetic simulations are combined with numerical models and the signal processing is both, investigated and evaluated. Compared to a measurement based setup, an excellent agreement is achieved and the concept is proven.

[IEEE Library]

Tags: Multipole-Resonance-Probe, plasma;