Plasma Series Resonance based Control Concept for Capacitive Discharges

Dennis Ziegler, Ralf Peter Brinkmann

49th Work­shop on Uti­li­sa­ti­on of Si­gnal Con­trol from Plas­ma Me­a­su­re­ments to es­ta­blish Pro­cess Con­trol, Du­blin, Ire­land, 04-06 Oc­to­ber

Tags: Control Concept, series resonance