Practical implementation of a two-hemisphere plasma absorption probe

Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann, C. Scharwitz, M.Böke, M.Lapke

Appl. Phys. Lett. 94, 011502 (2009)


Abstract

The plasma absorption probe is a recently developed tool for efficient determination of electron densities of low temperature plasmas. The occurrence of multiple absorption signals was a serious drawback for interpretation of the probe data. To remedy this drawback, a spherically symmetric design of an absorption probe is proposed. A spherical probe is tested in experiment and simulation and the suppression of the multiple absorption signals is demonstrated. The proof of principle for the concept is given.

[DOI]

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