Skin effect in an asymmetrical capacitive discharge

Micheal Klick, Torben Hemke, Thomas Mussenbrock, Ralf Peter Brinkmann

61th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Dal­las Texas, USA, 13-17 Oc­to­ber

Tags: RF discharges, skin effect