On the skin effect in symmetrically driven rf discharges

Thomas Mussenbrock, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Michael Klick

28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

Tags: RF discharges, skin effect