A spatially resolved model for the RF impedance and its corresponding admittance of the bulk of a low pressure plasma

Schabnam Naggary, Thomas Mussenbrock, Ralf Peter Brinkmann

WELT­PP-14, Kerk­ra­de, The Nether­lands, 01-02 De­cem­ber 2011


Abstract

RF-currents of CCPs exhibit complex electron dynamics referred to as self-excited plasma series resonances. To simulate this phenomenon a multi-mode model consisting of a linear bulk model coupled to a non-linear sheath model is presented. This presentation covers the bulk model and details on the sheath model are given in the Talk by Elgendy et al.[1,2,3]

[1] T. Mussenbrock et al., PSST {bf16}, 377 (2007) [2] D. Ziegler et al., PSST {bf 17}, 045011 (2008) [3] Talk Elgendy et al. WeltPP 14

Tags: series resonance excitation, spatially resolved modelling