course: semiconductor technology

number:
141384
teaching methods:
lecture with integrated tutorials
media:
computer based presentation, black board and chalk
responsible person:
Prof. Dr.-Ing. Martin Hoffmann
lecturer:
Dr.-Ing. Ulrich Wieser (ETIT)
language:
german
HWS:
3
CP:
4
offered in:
winter term

dates in winter term

  • start: Wednesday the 09.10.2019
  • lecture Wednesdays: from 14:15 to 15.45 o'clock in ID 03/455
  • tutorial Wednesdays: from 16:00 to 16.45 o'clock in ID 03/455

Exam

All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:FlexNow
Duration:30min

goals

Starting from the basics in the field of materials science the participants understand fundamental aspects of the preparation techniques of modern semiconductor devices and integrated circuits. Therewith the graduate of the course is prepared for the specific challenges of the industrial semiconductor process technology.

content

For the preparation of semiconductor devices and integrated circuits a variety of different technological processes are necessary. First you need to produce highly pure semiconductor crystals in form of wafers representing the base material for microelectronics. Subsequently the wafers are oxidized, coated, patterned, doped and divided by various processes and finally bonded and packed as devices or integrated circuits. The course "Semiconductor Technology" provides a basic understanding of important processes and techniques concerning the preparation of semiconductor devices. The content of the course includes topics like:

  • production of highly pure single crystals
  • epitaxial techniques
  • oxidation processes
  • lithography methods
  • etching processes
  • deposition processes
  • doping techniques
  • assembly and packaging technology

requirements

keine

recommended knowledge

  • Basics of Chemistry
  • Physics
  • Electronic Materials
  • Electronic Devices

materials

presentation slides:

tutorials: