course: Optical Metrology
- teaching methods:
- lecture with tutorials
- computer based presentation, black board and chalk
- responsible person:
- Prof. Dr.-Ing. Nils C. Gerhardt
- Prof. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
- offered in:
- summer term
dates in summer term
- start: Monday the 12.04.2021
- lecture Mondays: from 14:15 to 15.45 o'clock
- tutorial Fridays: from 10:15 to 11.45 o'clock
Die Angaben zu den Prüfungsmodalitäten (im WiSe 2020/2021 | SoSe 2021) erfolgen vorbehaltlich der aktuellen Situation. Notwendige Änderungen aufgrund universitärer Vorgaben werden zeitnah bekanntgegeben.
Date according to prior agreement with lecturer.
|Form of exam:||oral|
|Registration for exam:||FlexNow|
The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.
Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.
Fundamental knowledge of electromagnetic waves and optics
- Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007
The courses in summer 2021 will be offered digitally. All material will be distributed via moodle (moodle.ruhr-uni-bochum.de), interactive sessions will be offered via Zoom. To participate:
Please search the course Optical Metrology (141263-SoSe21) in moodle and use the function 'Course enrol confirmation' to ask for enrolment. A RUB-email address is required to confirm the enrolment. Enrolment with other email addresses will only be possible until enrolment at the RUB is completed. In that case, please provide full contact information and your desired master course (LAP, ETIT ...) in the comment field for enrolment.