course: Optical Metrology

teaching methods:
lecture with tutorials
computer based presentation, black board and chalk
responsible person:
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
offered in:
summer term

dates in summer term

  • start: Monday the 20.04.2020
  • lecture: siehe "Sonstiges"


All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:FlexNow


The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.


Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.



recommended knowledge

Fundamental knowledge of electromagnetic waves and optics


  1. Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007


Important information

Dear students,

as you were informed in the open letter from the Prorector, the Courses for the summer semester based on the current Situation of coronavirus will be offered digitally. To enable you to participate in the LAP modules, the registration of the modules will be organized via the Moodle course PTT / LAP courses summer term 2020 (password: 20LAP_Courses20).

There you will be in­for­med about the lectures and courses in the sum­mer se­mes­ter 2020 and you can select your de­s­i­red courses. During the first weeks oft he summer semester, we will transfer you to the Moodle courses of the chosen course or provide you with updated information.

We make every effort to offer you the fullest possible range of courses. Please understand that in some cases it's going to take some time before we can respond to all requests. However, we will try to ensure that all courses run orderly.