course: Technische Hochfrequenzplasmen

number:
141366
teaching methods:
lecture with tutorials
media:
computer based presentation, black board and chalk
responsible person:
Prof. Dr.-Ing. Peter Awakowicz
Lecturers:
Dr. Julian Schulze (ETIT), M. Sc. Birk-Sören Berger (ETIT), M. Sc. Moritz Oberberg (ETIT), M. Sc. Stefan Ries (ETIT)
language:
german
HWS:
4
CP:
5
offered in:
summer term

dates in summer term

  • start: Tuesday the 21.04.2020
  • lecture Tuesdays: from 10:15 to 11.45 o'clock
  • tutorial Wednesdays: from 12:15 to 13.45 o'clock

Exam

All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:FlexNow
Duration:30min

goals

The students are proficient in the theoretical basics required for the description of particle transport, sheaths, heating mechanisms, and equilibrium concepts in high frequency technological plasmas. They are familiar with selected plasma diagnostics and simulation techniques. They know different types of technological high frequency plasmas such as capacitive and inductive radio frequency discharges and understand their modes of operation as well as industrial applications. The students can understand international publications in the field of high frequency technological plasma science and can summarize their content in the frame of a short oral presentation.

content

  • Introduction
  • Basics
  • Transport
  • Sheath models
  • Heating mechanisms
  • Equilibrium concepts
  • Selected diagnostics and simulation techniques
  • Capacitive Radio Frequency Plasmas
  • Inductive Radio Frequency Plasmas
  • Applications

All content is can be downloaded via the lecture website in digitalized form.

The lecture and tutorial include recent international research results.

requirements

keine

recommended knowledge

Mathematics 1, 2, 3 General Electrical Engineering 1, 2, 3, 4 Elektrophysics Plasmatechnology 1

materials

script:

presentation slides:

tutorials:

miscellaneous:

literature

  1. Braithwaite, Nick, Chabert, Pascal "Physics of Radio-Frequency Plasmas", Cambridge University Press, 2011
  2. Lichtenberg, Allan J., Lieberman, Michael A. "Principles of Plasma Discharges and Materials Processing", Wiley-Interscience, 1994

miscellaneous

Due to the Corona crisis there is a chance that all classes will be realized virtually in the summer semester 2020. All students, who want to attend this class, need to register for this class by sending an email to "schulze(at)aept.rub.de" before the start of classes. Information on how this class will be realized virtually will be sent to all registered attendees by email.