Veranstaltung: Optical Metrology

Nummer:
148208
Lehrform:
Vorlesung und Übungen
Medienform:
rechnerbasierte Präsentation, Tafelanschrieb
Verantwortlicher:
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt
Dozenten:
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
Sprache:
Englisch
SWS:
3
LP:
4
Angeboten im:
Sommersemester

Termine

Termine bitte im Vorlesungsverzeichnis nachschlagen.

Prüfung

Termin nach Absprache mit dem Dozenten.

Prüfungsform:mündlich
Prüfungsanmeldung:None
Dauer:30min
Beschreibung der Prüfungsleistung:

For LAP students: exam has to be taken as a combined module exam in the module Metrology.

Ziele

The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.

Inhalt

Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.

Voraussetzungen

none

Empfohlene Vorkenntnisse

Fundamental knowledge of electromagnetic waves and optics

Literatur

  1. Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007