course: Microactuators and Microsenors

teaching methods:
lecture with tutorials
responsible person:
Prof. Dr.-Ing. Martin Hoffmann
Prof. Dr.-Ing. Martin Hoffmann (ETIT)
offered in:
winter term

dates in winter term

  • start: Monday the 14.10.2019
  • lecture Mondays: from 08:30 to 10.00 o'clock in ID 04/401
  • tutorial Mondays: from 10:15 to 11.00 o'clock in ID 04/401


All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:FlexNow


The students will learn selected concepts of actuators and sensors, and can describe their fields of application as well as their particular characteristics. They are able to derive appropriate concepts for new fields of applications and can describe the theory of basic transducers.


Every day, we are surrounded by microsensors and –actuators, they can be found in smartphones, cars, domestic appliances or game consoles as well as in activity trackers. But, how can a smartphone detect up and down, and how does a driver-assistance system work? Why does a navigations system work even in a tunnel or a house? How can a gas sensor recognize critical concentrations of gas? What are the uses of microactuators? To all this questions this course will provide informed answers. The main topics of the course are the fundamental concepts of microsensors and microactuators. It will address both the underlying measuring principles and the microtechnical implementation of microsensors. Next to mechanical parameters, such as pressure, velocity, force or angular rate, chemical sensors will be presented. Summary sensor, who are able to detect i.e. inflammables gases, as well as concepts for highly specific sensors on IR basis are introduced. Another example is the electronic nose, which can determine specific “fingerprints” of substances with its multitude of sensors. Regarding actuators, the significant basic principles of microactuators and the differences to macroscopically dominating magnetic actuators will be discussed. This includes electrostatic, piezoelectric, thermic and shape memory actuators as well as unusual principles like electrowetting, i.e. controlling the moistening of a surface via electrical charges.



recommended knowledge

Broadly based knowledge of Electrical Engineering.


presentation slides:


Das Passwort für das von uns zur Verfügung gestellte Lehrmaterial (pdf-Dateien) wird in der Vorlesung bekanntgegeben!