course: Halbleitertechnologie 2
- teaching methods:
- lecture with tutorials
- overhead transparencies, handouts, black board and chalk
- responsible person:
- Prof. Dr.-Ing. Martin Hoffmann
- Prof. Dr.-Ing. Martin Hoffmann (ETIT)
- offered in:
- summer term
dates in summer term
- start: Wednesday the 21.04.2021
- lecture Wednesdays: from 08:30 to 10.00 o'clock
- tutorial Wednesdays: from 10:15 to 11.00 o'clock
Date according to prior agreement with lecturer.
|Form of exam:||oral|
|Registration for exam:||FlexNow|
This course presents primarily technologies of microsystems technology which surpass the construction of simple electronic structures but are based largely on the processes of semiconductor technology. This also encompasses methods suitable to produce mechanical and fluidic systems. References to practical applications are made.
The students will become acquainted with the different methods of additive and substractive production of structures and will be able to assess their pros and cons. This course will also address the topics of procedural conditions (vacuum, basics of plasma technology) and clean room technology, as far as they are necessary to the understanding of the processes.
- Comparison of macroscopic and microscopic production processes
- Limitations and possibilities of optical microscopy
- Contaminations and clean room technology to avoid them
- Silicon as a micromechanical material
- Physical vapour deposition: specific properties of sputtering and vapour deposition
- Materials: piezoelectric aluminium nitrate, materials for structures and sacrificial layers, reactive layer systems, Bragg angle deposition of nano structures
- Additive methods: vapour deposition, electroplating and currentless deposition
- LIGA – lithography and galvanic moulding: development and applications
- Dry etching processes: ranging from highly selective to massively anisotropic
- Three-dimensional structures in silicon: anisotropic wet etching processes
- Introduction into nano imprint lithography (NIL)
Bachelor of Electrical Engineering; Knowledge of technology is helpful, but not necessary.
Im Sommersemester 2021 wird diese Vorlesung als online-gestützte Veranstaltung ohne Präsenzveranstaltungen durchgeführt.
Beginn ist Mittwoch, der 21.04.2021.
Die Selbsteinschreibung ist über Moodle vom 24.03.2021 bis zum 30.04.2021 möglich.