course: Microsystems Technology

teaching methods:
lecture with tutorials
responsible person:
Prof. Dr.-Ing. Martin Hoffmann
Prof. Dr.-Ing. Martin Hoffmann (ETIT)
offered in:
summer term

dates in summer term

  • start: Tuesday the 21.04.2020
  • lecture Tuesdays: from 08:30 to 10.00 o'clock
  • tutorial Tuesdays: from 10:00 to 11.30 o'clock


All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:mündlich + studienbegleitend
Registration for exam:FlexNow


The students are able to assess the scaling of physical processes and to apply it using operating figures. They are also capable to execute basic principles of microsystems technology discreetly. They are familiar with the special properties of silicon as a mechanical material. They are able to describe accurately the fundamental concepts of transducers in microsystems technology and can apply them to basic applications. By means of selected examples they can portray a context system and demonstrate how practical applications influence transducer concepts in microsystem technology. Furthermore, the students know the most important technologies in microsystem technology and can evaluate the influence of temperature on microsystems.


The course is comprised of the following topics:

  • Introduction into microsystems technology (MST): Following a depiction of the development of semiconductor technology into MST, different applications of micro technical sensors for pressure and acceleration are presented to delineate the range of MST applications.
  • Scaling and operating figures: the peculiarities of minimising sensors and actors are discussed, based on the method of scaling and with the help of nondimensional operating figures. A focus is put on developing an understanding of the specific properties of microsystems.
  • Fundamentals of micromechanics: The first part starts by introducing the basic principles of mechanics relevant for MST. In the second part, the micromechanical properties of silicon are presented, which are the basis for most microsystems. The focus here is the anisotropic behaviour of monocrystals and the particular electromechanical properties of silicon. Additionally, the topic of thermal induced mechanical stresses is mentioned.
  • Transducer concepts: In this section, the most important transducer concepts of non-electrical and electrical domains are presented, including both basic sensory and actory transducers. By means of continuity and balance equations it is shown, that many physical domains can also be described as networks. Three selected transducers and their corresponding systematic approaches are analysed in more detail: a digital light processor used in video projection, an angular rate sensor and a microphone.
  • Technologies used in microsystems technology: The course is concluded with an introduction into the basic technologies used in microsystems technology. Here, only a short outline of the different processes is given. It is demonstrated how modified semiconductor processes can allow for a three-dimensional structuring of silicon for use in micromechanics.

recommended knowledge



Im Som­mer­se­mes­ter 2020 wird die­se Vor­le­sung als on­line-ge­stütz­te Ver­an­stal­tung ohne Prä­senz­ver­an­stal­tun­gen durch­ge­führt.

Be­ginn ist Dienstag, der 21.​04.​2020.

Die Selbst­ein­schrei­bung ist vom 16.04.2020 bis zum 28.​04.​2020 mög­lich.

Pass­wort für die Selbst­ein­schrei­bung: etit-mst-2020

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