course: Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas
- teaching methods:
- lecture with tutorials
- handouts, computer based presentation
- responsible person:
- Prof. Dr. Ralf Peter Brinkmann
- Dr. Michael Klick (extern)
- offered in:
- winter term and summer term
dates in winter term
dates in summer term
All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.
Date according to prior agreement with lecturer.
|Form of exam:||oral|
|Registration for exam:||Directly with the lecturer|
The lecture takes place as a block course from 12.02.2019 - 15.02.2019 in room ID 03/401.
The lecture will be held in German. The script of the lecture is in English and will be distributed as a printout. Necessary: basics of electrical engineering, electric and magnetic fields. Recommended: "Plasma Technology I", Prof. Awakowicz & "Introduction to Plasma Physics", Prof. von Keudell In addition: "Technical High Frequency Plasmas", Dr. Ing. Schulze
It is not yet clear whether and when the event can be held in SS 2020.