course: Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas

number:
141368
teaching methods:
lecture with tutorials
media:
handouts, computer based presentation
responsible person:
Prof. Dr. Ralf Peter Brinkmann
lecturer:
Dr. Michael Klick (extern)
language:
german
HWS:
2
CP:
3
offered in:
winter term

dates in winter term

  • lecture: Monday the 19.10.2020 from 09:00 to 17.00 o'clock in ID 04/401
  • lecture: Tuesday the 20.10.2020 from 09:00 to 17.00 o'clock in ID 04/401
  • lecture: Wednesday the 21.10.2020 from 09:00 to 17.00 o'clock in ID 04/401
  • lecture: Thursday the 22.10.2020 from 09:00 to 17.00 o'clock in ID 04/401
  • lecture: Friday the 23.10.2020 from 09:00 to 17.00 o'clock in ID 04/401

Exam

Die Angaben zu den Prüfungsmodalitäten (im WiSe 2020/2021 | SoSe 2021) erfolgen vorbehaltlich der aktuellen Situation. Notwendige Änderungen aufgrund universitärer Vorgaben werden zeitnah bekanntgegeben.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:Directly with the lecturer
Duration:30min

goals

The lecture takes place as a block course from 19.10.20 till 23.10.10 in room ID 04/401.

content

The lecture will be held in German. The script of the lecture is in English and will be distributed as a printout. Necessary: ​​basics of electrical engineering, electric and magnetic fields. Recommended: "Plasma Technology I", Prof. Awakowicz & "Introduction to Plasma Physics", Prof. von Keudell In addition: "Technical High Frequency Plasmas", Dr. Ing. Schulze

miscellaneous

The next lesson will probably be given in October 2022.