course: Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas

number:
141368
teaching methods:
lecture with tutorials
media:
handouts, computer based presentation
responsible person:
Prof. Dr. Ralf Peter Brinkmann
lecturer:
Dr. Michael Klick (extern)
language:
german
HWS:
2
CP:
3
offered in:
winter term and summer term

dates in winter term

  • lecture:

dates in summer term

  • lecture:

Exam

All statements pertaining to examination modalities (for the summer/winter term of 2020) are given with reservations. Changes due to new requirements from the university will be announced as soon as possible.

Date according to prior agreement with lecturer.

Form of exam:oral
Registration for exam:Directly with the lecturer
Duration:30min

goals

The lecture takes place as a block course from 12.02.2019 - 15.02.2019 in room ID 03/401.

content

The lecture will be held in German. The script of the lecture is in English and will be distributed as a printout. Necessary: ​​basics of electrical engineering, electric and magnetic fields. Recommended: "Plasma Technology I", Prof. Awakowicz & "Introduction to Plasma Physics", Prof. von Keudell In addition: "Technical High Frequency Plasmas", Dr. Ing. Schulze

miscellaneous

It is not yet clear whether and when the event can be held in SS 2020.