Nummer Name Dozent
1 141281 Plasmamedicine Gibson, Andrew R.
2 141284 Plasma Technology 2 Awakowicz, Peter
3 141290 Plasma Spectroscopy Awakowicz, Peter
4 141302 Circuits Suitable for BiCMOS Integration Oehm, Jürgen
5 141362 Modeling of Technological Plasmas Brinkmann, Ralf Peter
6 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
7 141366 Technische Hochfrequenzplasmen Schulze, Julian
8 141367 Electromagnetic Fields Eremin, Denis
9 141368 Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas Klick, Michael
10 141373 Plasma Chemistry Kemaneci, Efe

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