Nummer Name Dozent
1 141367 Electromagnetic Fields Eremin, Denis
2 141366 Technische Hochfrequenzplasmen Schulze, Julian
3 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
4 141363 Plasma Sheaths Brinkmann, Ralf Peter
5 141362 Modeling of Technological Plasmas Brinkmann, Ralf Peter
6 141361 Fields, Waves and Particles Brinkmann, Ralf Peter
7 141302 Circuits Suitable for BiCMOS Integration Oehm, Jürgen
8 141301 Design of Analogue BiCMOS Circuits Oehm, Jürgen
9 141290 Plasma Spectroscopy Awakowicz, Peter
10 141285 Writing particle based simulation codes: from electron swarms to radio-frequency-plasmas Schulze, Julian

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