Nummer Name Dozent
1 141368 Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas Klick, Michael
2 141367 Electromagnetic Fields Eremin, Denis
3 141366 Technische Hochfrequenzplasmen Schulze, Julian
4 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
5 141363 Plasma Sheaths Brinkmann, Ralf Peter
6 141362 Modeling of Technological Plasmas Brinkmann, Ralf Peter
7 141361 Fields, Waves and Particles Brinkmann, Ralf Peter
8 141302 Circuits Suitable for BiCMOS Integration Oehm, Jürgen
9 141301 Design of Analogue BiCMOS Circuits Oehm, Jürgen
10 141290 Plasma Spectroscopy Awakowicz, Peter

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