Nummer Name Dozent
1 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
2 141368 Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas Klick, Michael
3 141400 Mechatronic Drive Systems Krüger, Matthias
4 141089 Smart Grids Laskowski, Michael
5 141064 Electromagnetic Compatibility Meckelburg, Hans-Jürgen
6 141168 Embedded Multimedia Theimer, Wolfgang
7 141408 Charging Facilties for Electric Mobility Turki, Faical

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