Nummer Name Dozent
1 141346 Software Engineering Studiendekan ITS
2 141361 Fields, Waves and Particles Brinkmann, Ralf Peter
3 141363 Plasma Sheaths Brinkmann, Ralf Peter
4 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
5 141368 Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas Klick, Michael
6 141370 Numerical Plasma Simulation Kemaneci, Efe
7 141372 Electromagnetic Waves Eremin, Denis
8 141374 Fundamentals of GPU Programming Eremin, Denis
9 141378 Computational Engineering 2: Electrodynamics Geiser, Jürgen
10 141380 Selected topics in the field of microsystems technology Hoffmann, Martin

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