Nummer Name Dozent
1 141261 Photonics Hofmann , Martin R.
2 141263 Optical Metrology Gerhardt, Nils C.
3 141280 Biomedical Applications of Plasma Technology Gibson, Andrew R.
4 141284 Plasma Technology 2 Awakowicz, Peter
5 141290 Plasma Spectroscopy Awakowicz, Peter
6 141302 Circuits Suitable for BiCMOS Integration Oehm, Jürgen
7 141362 Modeling of Technological Plasmas Brinkmann, Ralf Peter
8 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
9 141366 Technische Hochfrequenzplasmen Schulze, Julian
10 141367 Electromagnetic Fields Eremin, Denis

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