Nummer Name Dozent
1 141284 Plasma Technology 2 Awakowicz, Peter
2 141290 Plasma Spectroscopy Awakowicz, Peter
3 141302 Circuits Suitable for BiCMOS Integration Oehm, Jürgen
4 141362 Modeling of Technological Plasmas Brinkmann, Ralf Peter
5 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
6 141366 Technische Hochfrequenzplasmen Schulze, Julian
7 141367 Electromagnetic Fields Eremin, Denis
8 141368 Radia Frequency Technology and Electrostatic Substrate clamping for technical plasmas Klick, Michael
9 141373 Plasma Chemistry Kemaneci, Efe
10 141377 Computational Engineering 1: Fluiddynamics in electrical-engineering Geiser, Jürgen

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