Nummer Name Dozent
1 160505 Plasma Diagnostics Schultz-von der Gathen, Volker
2 141281 Plasmamedicine Gibson, Andrew R.
3 141363 Plasma Sheaths Brinkmann, Ralf Peter
4 141290 Plasma Spectroscopy Awakowicz, Peter
5 141283 Plasma Technology 1 Awakowicz, Peter
6 141284 Plasma Technology 2 Awakowicz, Peter
7 141364 Plasma Technology for Semiconductor Manufacturing Klick, Michael
8 137270 Prozessführung und Optimalsteuerung Mönnigmann, Martin
9 141002 Implementation of Process Control Methods Kiupel, Niels
10 141403 Renewable Electric Power Engineering Sourkounis , Constantinos

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