Global modeling of low and high power HiPIMS discharges

2014 - Sara Gallian, Jan Trieschmann, Thomas Mussenbrock, William N. G. Hitchon, Ralf Peter Brinkmann

The 14th International Conference on Plasma Surface Engineering (PSE) 2014, Garmisch-Partenkirchen, Germany, September 15 - 19, 2014